my %args = (
    eqpid      => $eqpid, 
    chamber    => $chamber, 
    lotid      => $lotid, 
    wafer_flow => $wafer_flow, 
    recipe     => $recipe, 
    wafer_slot => wafer_slot,
    # etc.
);

sub_call(%args);

sub sub_call {
    my %args = shift;

    # do some validation

    # do some work
}