Record FileRecord  "1.8"
{
  Record LotRecord "1234567.123"
  {
    Record WaferRecord "01"
    {
      Field DieOrigin 2 {0, 0}
      Field OrientationInstructions 1 {""}
      Field ProcessEquipmentState 7 {"NONE", "", "", "", "", "", ""}
      Field SampleCenterLocation 2 {-100000, 900000}
      Field SlotNumber 1 {2}

      List DefectList
      {
        Columns 32 { int32 DEFECTID,  int32 XREL,  int32 YREL,  int32 XINDEX,  int32 YINDEX,  
        int32 XSIZE,  int32 YSIZE,  float DEFECTAREA,  int32 DSIZE,  int32 CLASSNUMBER,  
        int32 TEST,  int32 CLUSTERNUMBER,  int32 ROUGHBINNUMBER,  int32 FINEBINNUMBER,  int32 REVIEWSAMPLE,  
        float CONTRAST,  int32 CHANNELID,  int32 MANSEMCLASS,  int32 AUTOONSEMCLASS,  int32 MICROSIGCLASS,  
        int32 MACROSIGCLASS,  int32 AUTOOFFSEMCLASS,  int32 AUTOOFFOPTADC,  int32 FACLASS,  int32 INTENSITY,  
        float KILLPROB,  int32 MACROSIGID,  int32 REGIONID,  ImageList IMAGEINFO,  
        int32 POLARITY,  float CRITICALAREA,  int32 MANOPTCLASS  }
        Data 902
        {
          1 11111 722222 -3 16 1000 600 58000 2000 0 1 0 11 0 0 0.0000 
            0 0 0 0 0 0 0 0 0 0.0000 0 0  N 0 0.0000 0 ;
          1 11111 722222 -3 16 1000 600 58000 2000 0 1 0 11 0 0 0.0000 
            0 0 0 0 0 0 0 0 0 0.0000 0 0  N 0 0.0000 0 ;