Do you mean something like this?
my (
$eqpid, # This
$chamber, # looks
$lotid, # like
$wafer_flow, # a
$recipe, # good
$wafer_slot, # place
$step_value, # for
$alarmtype, # some
$sensor, # Comments!
$signal_level,
$alarm_upper_limit, # (C) 1980 Stick-Ups Corporation
$alarm_lower_limit,
$code,
$date_submited,
$time_submited,
$filenames,
$usercode,
$sock,
) = @_;
You should be able to put a newline anywhere you could use a space.
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